E05412 - SEMI E54.12 - Specification for Sensor/Actuator Network Communications for CC-Link Revision:SEMI E54.12-1019 - Superseded This Test Method uses a

This Test Method uses a calorimetric power meter

Fab Construction Monitor and the Fab Equipment Monitor

org in February 2012

SEMI E133-1218 (technical revision)

E05412 - SEMI E54.12 - Specification for Sensor/Actuator Network Communications for CC-Link Revision:SEMI E54.12-1019 - Superseded This Test Method uses aNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of the SEMI sensor actuator network (SAN) suite of Standards and defines a specific communications protocol based on the CC Link standard. This network communication standard (NCS) taken together with the SEMI SAN Standard suite and the CC Link standard completely and unambiguously defines an open standard