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SEMI F44-0307 (Reapproved 0818)
SEMI M17-0704 (technical revision)
FPD基板のエッジの様々な外観を定義し，その関係を述べている。本文書は他のSEMI FPD文書に述べられている用語の存在を仮定している。本文書は厚み仕様の公称値が1
This Standard may be used on all types of semiconductor leadframe and molding compound
E14100 - SEMI E141 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology StdPbc-1015 SEMI F44-0307 (Reapproved 0818)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The application of integrated metrology is anticipated to become a key factor for advanced process control in future integrated circuit (IC) manufacturing. Important parameters, which are typically measured for the
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