D01600 - SEMI D16 - FPDマテリアルハンドリングシステムとツールポート間の機械的インタフェース仕様 StdTpc-Gases - Noble and one or more SEMI

and one or more SEMI Standard-specific device model specifications (e

1-0709 (technical revision)

Many requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces

This Standard can apply to rectangle shapes

D01600 - SEMI D16 - FPDマテリアルハンドリングシステムとツールポート間の機械的インタフェース仕様 StdTpc-Gases - Noble and one or more SEMIFlat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19987North American Regional Standards Committee19987SEMI On Line19989 FPD WIPAGV Referenced SEMI Standards SEMI D5 Standard Size for Flat Panel Display Substrates SEMI D11 Specification for Flat Panel Display Glass Substrate Cassettes