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S01500 - SEMI S15 - Safety Guideline for the Evaluation of Toxic and Flammable Gas Detection Systems Revision:SEMI S15-0200 (Withdrawn 0707) - Withdrawn SEMI M53-0706 (technical revision)

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Description

SEMI M53-0706 (technical revision)

Barcode specification for shipping pack is referred to EIA 556A or EIAJ barcode specification

SEMI MF110-1105 (technical revision)

orgで,そして2009年11月にCD-ROMで入手可能となる。初版は2000年2月に発行された。

S01500 - SEMI S15 - Safety Guideline for the Evaluation of Toxic and Flammable Gas Detection Systems Revision:SEMI S15-0200 (Withdrawn 0707) - Withdrawn SEMI M53-0706 (technical revision)NOTICE: This Document was balloted and approved for withdrawal in 2007. This guideline provides considerations for the evaluation of fixed gas detection systems used to monitor for safety of plant personnel, product and materials, the local environment and community. It provides an evaluation guide and reference sources appropriate to facilities and equipment where toxic and flammable gases are used and stored in gaseous or liquid form. Referenced

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