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and optical interferometric measurement methods
operational policy and constraints
SEMI F45-0307 (Reapproved 0818)
Nonuniformity of the surface leads to nonuniform oxide on a wafer and causes degradation of the oxide breakdown voltage
S02100 - SEMI S21 - Safety Guideline for Worker Protection Revision:SEMI S21-1103 - Superseded and optical interferometric measurement methodsThis Safety Guideline was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 1, 2018. Available at www. semiviews. org and www. semi. org in August 2018; originally published October 2003; previously published June 2012. This Safety Guideline identifies preferred methods for the protection of persons from safety and