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C03100 - SEMI C31 - Specification for Methanol StdPbc-1110 This Document is intended to

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Description

This Document is intended to provide the minimum criteria for the analysis of uncertainty associated with preparation and use of gravimetric gas mixtures used for calibrating analytical instruments to determine whether various SEMI impurity specification are satisfied

The purpose of this Document is to provide a series of specifications for different grades of argon (Ar) that are used in the semiconductor industry

the end user should determine which analyses are required and whether to conduct optional testing

The results of this test can be used for the qualitative ranking of gas delivery components based on the design as it relates to moisture dry-down performance of the system

C03100 - SEMI C31 - Specification for Methanol StdPbc-1110 This Document is intended toNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to standardize requirements for methanol used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid

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