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SEMI D6-92 (first published)
previously published November 2002
This Test Method applies to all types of in-line components used in gas delivery systems for precise delivery of gaseous species used in semiconductor manufacturing
12-0116 (technical revision)
C00602 - SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様 StdPbc-0616 SEMI D6-92 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1993200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by
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