E05700 - SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様 StdPbc-0526 SEMI 3D17-1217 (first published)

SEMI 3D17-1217 (first published)

This specification is specific to Hydrogen (H2)

This document covers the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus

Acceptable static charge levels continue to decrease with product feature size

E05700 - SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様 StdPbc-0526 SEMI 3D17-1217 (first published)global Physical Interfaces & Carriers Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199620053 300 mm Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF)