E05421 - SEMI E54.21 - Specification for Sensor Actuator Network for Motionnet Communication StdPbc-0419 and resultant particle size and

and resultant particle size and count are addressed in this Guide

org in July 2009

This Standard covers PCL specifications for both Fixed Buffer Equipment and Internal Buffer Equipment

SEMI E133-1107 (technical revision)

E05421 - SEMI E54.21 - Specification for Sensor Actuator Network for Motionnet Communication StdPbc-0419 and resultant particle size andThis Document defines a communication specification based on the MOTIONNET protocol to enable communications between intelligent devices on a Sensor Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment. This Document gives interoperability with SEMI E54 common specific device model based Sensor Actuator devices. This Document specifies how Sensor Actuator Controller devices interoperate on