E01501 - SEMI E15.1 - Specification for 300 mm Tool Load Port StdPbc-0318 SEMI E169-0414 (first published)

SEMI E169-0414 (first published)

Repeated use of this Test Method on different areas of the specimen permits mapping of the surface TIS and computed rms microroughness

These test methods have been shown to give statistically valid results

they are only used for limited types of Mura and are not practical in real varied cases

E01501 - SEMI E15.1 - Specification for 300 mm Tool Load Port StdPbc-0318 SEMI E169-0414 (first published)NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements for the load ports of 300 mm wafer process and inspection equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate